common_ground:
OK, i find solution for Arduino as ISP and ATTINY13 on 128 KHz :
No change. I think it's time to try something new. Tomorrow I'll take another attiny13 to replace the current one and see if it is going to programmed, just in case I screwed something with schematic or managed to shortcut my poor attiny :). I will also try to find an AVR-fan-neighbor to borrow an external programmer.