You wrote: " i need to measure with sub microsecond accuracy.",
You cannot do this with reflected light due to diffraction at the edge of the object, change in amount of reflected light as more and more of the object is illuminated as it enters the measuring arena, and then the reverse happens as it leaves.
You need "break-beam" measurements so the edges, only of the object are involved in the measuring to get the time in front that you desire.
Paul