Bootloader with Atmel-ICE

I am trying to load the Bootloader to a ATTiny1634 (Optiboot) from the ATTinyCore by SpenceKonde with the Atmel-ICE programmer.
I have tried this with both 3.3V and 5V.
I receive the following error:

Arduino: 1.8.19 (Windows 10), Board: "ATtiny1634 (Optiboot), UART0 (Serial), Enabled, 8 MHz (external), B.O.D. Enabled (1.8v), B.O.D. Disabled (saves power), B.O.D. Disabled (saves power), Enabled, Port A (pins 1~8)"

C:\Users\Robert\AppData\Local\Arduino15\packages\arduino\tools\avrdude\6.3.0-arduino18/bin/avrdude -CC:\Users\Robert\AppData\Local\Arduino15\packages\ATTinyCore\hardware\avr\1.5.2/avrdude.conf -v -pattiny1634 -catmelice_isp -Pusb -e -Uefuse:w:0b11111110:m -Uhfuse:w:0b11011110:m -Ulfuse:w:0xED:m -Uflash:w:C:\Users\Robert\AppData\Local\Arduino15\packages\ATTinyCore\hardware\avr\1.5.2/bootloaders/optiboot/optiboot_attiny1634_8000000L.hex:i 



avrdude: Version 6.3-20201216

         Copyright (c) 2000-2005 Brian Dean, http://www.bdmicro.com/

         Copyright (c) 2007-2014 Joerg Wunsch



         System wide configuration file is "C:\Users\Robert\AppData\Local\Arduino15\packages\ATTinyCore\hardware\avr\1.5.2/avrdude.conf"



         Using Port                    : usb

         Using Programmer              : atmelice_isp

         Setting bit clk period        : 5.0

avrdude: Found CMSIS-DAP compliant device, using EDBG protocol

         AVR Part                      : ATtiny1634

         Chip Erase delay              : 15000 us

         PAGEL                         : PD7

         BS2                           : PC2

         RESET disposition             : dedicated

         RETRY pulse                   : SCK

         serial program mode           : yes

         parallel program mode         : yes

         Timeout                       : 200

         StabDelay                     : 100

         CmdexeDelay                   : 25

         SyncLoops                     : 32

         ByteDelay                     : 0

         PollIndex                     : 3

         PollValue                     : 0x53

         Memory Detail                 :



                                  Block Poll               Page                       Polled

           Memory Type Mode Delay Size  Indx Paged  Size   Size #Pages MinW  MaxW   ReadBack

           ----------- ---- ----- ----- ---- ------ ------ ---- ------ ----- ----- ---------

           eeprom        65     5     4    0 no        256    4      0  3600  3600 0xff 0xff

           flash         65     6   128    0 yes     16384   32    512  4500  4500 0xff 0xff

           lfuse          0     0     0    0 no          1    0      0  4500  4500 0x00 0x00

           hfuse          0     0     0    0 no          1    0      0  4500  4500 0x00 0x00

           efuse          0     0     0    0 no          1    0      0  4500  4500 0x00 0x00

           lock           0     0     0    0 no          1    0      0  4500  4500 0x00 0x00

           calibration    0     0     0    0 no          1    0      0     0     0 0x00 0x00

           signature      0     0     0    0 no          3    0      0     0     0 0x00 0x00



         Programmer Type : JTAG3_ISP

         Description     : Atmel-ICE (ARM/AVR) in ISP mode

         Vtarget         : 5.4 V

         SCK period      : 5.00 us



avrdude: Short read, read only 0 out of 512 bytes

avrdude: jtag3_edbg_recv(): Unexpected response 0xd0

avrdude: stk500v2_jtag3_recv(): error in jtagmkII_recv()

avrdude: AVR device initialized and ready to accept instructions



Reading | avrdude: jtag3_edbg_send(): Unexpected response 0x81, 0x11

avrdude: jtag3_edbg_recv(): Unexpected response 0x80

avrdude: stk500v2_jtag3_recv(): error in jtagmkII_recv()

avrdude: Short read, read only 0 out of 512 bytes

avrdude: jtag3_edbg_send(): Unexpected response 0x5c, 0x01

avrdude: Short read, read only 0 out of 512 bytes

avrdude: jtag3_edbg_recv(): Unexpected response 0xd0

avrdude: stk500v2_jtag3_recv(): error in jtagmkII_recv()

################avrdude: Short read, read only 0 out of 512 bytes

avrdude: jtag3_edbg_send(): Unexpected response 0x4e, 0xb9

avrdude: Short read, read only 0 out of 512 bytes

avrdude: jtag3_edbg_recv(): Unexpected response 0xd0

avrdude: stk500v2_jtag3_recv(): error in jtagmkII_recv()

################################## | 100% 1.46s



avrdude: Device signature = 0x303030

avrdude: Expected signature for ATtiny1634 is 1E 94 12

         Double check chip, or use -F to override this check.

avrdude: Short read, read only 0 out of 512 bytes

avrdude: jtag3_edbg_send(): Unexpected response 0x31, 0x00

avrdude: Short read, read only 0 out of 512 bytes

avrdude: jtag3_edbg_recv(): Unexpected response 0xd0

avrdude: stk500v2_jtag3_recv(): error in jtagmkII_recv()

avrdude: Short read, read only 0 out of 512 bytes

avrdude: jtag3_edbg_send(): Unexpected response 0x01, 0x00

avrdude: Short read, read only 0 out of 512 bytes

avrdude: jtag3_edbg_recv(): Unexpected response 0xd0

avrdude: Short read, read only 0 out of 512 bytes

avrdude: jtag3_edbg_send(): Unexpected response 0x74, 0xf7

avrdude: Short read, read only 0 out of 512 bytes

avrdude: jtag3_edbg_recv(): Unexpected response 0xd0

avrdude: Short read, read only 0 out of 512 bytes

avrdude: jtag3_edbg_signoff(): failed to read from serial port (0)



avrdude done.  Thank you.



Error while burning bootloader.


It looks like you don't select correct programmer.

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