Mega 2560 as ISP for ATTiny

kwilson68:
Any thoughts on what might be causing this?

Yup...

I am using the ArduinoISP for the programmer, and I have a 10uF capacitor between +5V and GND to stop the Arduino from resetting.

Capacitor is connected to RESET and +5V (not GND) and GND. Be sure to get the polarity correct.