where it starts out accelerating up to full speed and then decelerates to a crawl just before reaching the target and gently makes contact with the target ( a wafer in a chamber) and comes to a stop.
The technical name for this is an over damped servo system.
It has the advantage of no overshoot but is slow at getting to the point.
Next comes what is called critically damped where there is one overshoot and then it comes back on position.
An under damped has several under shoot / over shoot cycles.
See:-