Ulra-high sensitivity range finders?

Morphinity:
I'm looking for a sensor that can detect changes ranging from 10 millimeters to 1 millimeter on a smooth surface, so I'll need something that can detect up to 3 decimal places. The system is meant to detect small cracks or dents with an accuracy/error rate of about 10%.

I'm not sure what you mean by "3 decimal places". Do you mean 1.00 to 10.0 mm or do you mean 1.000 to 10.000 mm?