AGND DGND Multiplexer 4067 questions

Dotted orange ground - a bad idea.
Dotted green ground - the right way as long as all the grounds go to that red spot. And the red spot is moved to the ATmega ground.
Make sure your 0.1uF capacitors on all the chips are ceramic and their leads are as short as you can make them.

It would be a good idea to have a star connection for the +5V as well, and maybe even a Pi filter on the +5V going to the analogue parts. If you can't manage the inductor then a 10R resistor and 47uF in addition would help.