Hi,
I'm trying to figure out how a MEMS accelerometer works by measuring the change in capacitance.
Here is a diagram of a MEMS accelerometer.
I edited the picture as shown below with the red area where i think each plate from the movable yellow frame matches with a plate on the fixed white frame. This leaves the two plates in the blue area which are unused. Am i correct? If yes, then why are these plates there? A wild guess would be... to protect the springs?
Another idea would be that the capacitance is being measured between each movable plate and the two fixed plates on each side of it? I'm not sure if/how that would even work.