Hello.
I am going to make plasma etcher cause of my pzt ceramic.
There is no way to pattering it so I decided to make plasma etcher.
Making plasma or plasma chamber is exist a lot at google or youtube.
Just making vaccum chamber and adding vaccum pump and power supply, it's done.
My question is why people do a HF(13MHz) not a DC generator at "plasma etcher"
At my mind, just hitting electron, doesn't it DC cause it's not a capacitor that have air.
I think it didn't have any insulator so doesn't it can deliver electrons?
Also I didn't understand WHY I need to supply GAS?(like Al203)