Program ATMEGA168-20PU

Hello,
I´d like to program my ATMEGA168-20PU using Arduino as ISP. I wired everything up like described here: http://arduino.cc/en/Tutorial/ArduinoISP

But how can I burn the bootloader? I tried several boards and always get the error:

avrdude: Yikes! Invalid device signature.
Double check connections and try again, or use -F to override
this check.

How can I add support for my ATMEGA?

The usual culprit is wiring.

Post the verbose output from avrdude. Please use
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tags.

Did you select a board that uses the ATmega168 from the tools -> board menu?

If you use one of the ones for a 328(p) it will complain that the signature doesn't match (maddeningly, it doesn't show you what signature it read - which is awful, because if it read 00 00 00, that's wiring. If it read a different number, that's not wiring)